| Product name | nano3DX |
| Benefit | High-resolution 3D computed tomography images |
| Technology | X-ray tomography |
| X-ray generator | MicroMax-007 HF |
| Tube voltage | 20 to 50 kV |
| Tube current | up to 30 mA |
| Target | Cr, Cu and Mo |
| Detector | X-ray CCD camera |
| Number of pixels | 3300 × 2500 |
| Pixel size | 0.27 to 4 μm |
| Field of view | 0.9 × 0.7 mm to 14 × 10 mm |
| Dynamic range | 16 bit |
| Stage rotation axis accuracy | < 0.5 μm |
